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Study of N2 He DC glow discharge
Optical emission spectroscopy and mass spectrometry measurement were used to study a gas mixture glow discharge of He and N2 at total pressure of 2.0 Torr, a power of 10 W and a flow of 16.5 l min. The emission bands were measured in the wavelength range of 200 to 1100 nm. The principal species obse...
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Published in: | Journal of physics. Conference series 2015-03, Vol.591 (1) |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | Optical emission spectroscopy and mass spectrometry measurement were used to study a gas mixture glow discharge of He and N2 at total pressure of 2.0 Torr, a power of 10 W and a flow of 16.5 l min. The emission bands were measured in the wavelength range of 200 to 1100 nm. The principal species observed were N2+ (B2Σ+u→X2Σ+g), N2 (C3Πu→B3Πg), and He, which agree with mass spectrometry measurement. |
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ISSN: | 1742-6588 1742-6596 |
DOI: | 10.1088/1742-6596/591/1/012067 |