Accuracy and Roughness of TiN Coatings Deposited by Vacuum Arc Plasma

Nitride coatings were deposited by vacuum arc plasma in an atmosphere of argon and nitrogen using different deposition conditions of part location and configuration, angle between plasma flow and processing surface. The coating thickness, part dimensions and surface roughness were measured before an...

Full description

Saved in:
Bibliographic Details
Published in:Journal of physics. Conference series 2015-11, Vol.652 (1), p.12051
Main Authors: Budilov, V, Ramazanov, K, Yagafarov, I, Vafin, R
Format: Article
Language:English
Subjects:
Accuracy
Arc deposition
Argon
Coating effects
Electric arcs
Form accuracy
Physics
Plasma
Stiffness
Surface roughness
Thickness
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Nitride coatings were deposited by vacuum arc plasma in an atmosphere of argon and nitrogen using different deposition conditions of part location and configuration, angle between plasma flow and processing surface. The coating thickness, part dimensions and surface roughness were measured before and after coating deposition. The type of part poor shape precision after coating deposition by vacuum arc plasma was defined. An impact of coating deposition by vacuum arc discharge on the part dimensional and form accuracy was revealed. The effect of parts location on dimensional and radial surfaces form accuracy was induced. The effect of coating surface polythickness on part dimensional and form accuracy for parts with different stiffness was defined. The impact of part location area and parts quantity on coating thickness, surface roughness, dimensional and form accuracy of part was revealed. The coating thickness distribution law, parts quality class and accuracy degree after vacuum ion plasma coating deposition were assigned.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/652/1/012051