Direct 3D printed shadow mask on Silicon

A 3D printed shadow mask method is presented. The 3D printer prints ABS plastic directly on the wafer, thus avoiding gaps between the wafer and the shadow mask, and deformation during the process. The wafer together with the 3D printed shadow mask was sputtered with Ti and Au. The shadow mask was re...

Full description

Saved in:
Bibliographic Details
Published in:Journal of physics. Conference series 2016-10, Vol.757 (1), p.12021
Main Authors: Rahiminejad, S, Köhler, E, Enoksson, P
Format: Article
Language:English
Subjects:
Low temperature
Physics
Shadow masks
Shadows
Three dimensional printing
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A 3D printed shadow mask method is presented. The 3D printer prints ABS plastic directly on the wafer, thus avoiding gaps between the wafer and the shadow mask, and deformation during the process. The wafer together with the 3D printed shadow mask was sputtered with Ti and Au. The shadow mask was released by immersion in acetone. The sputtered patches through the shadow mask were compared to the opening of the 3D printed shadow mask and the design dimensions. The patterned Au patches were larger than the printed apertures, however they were smaller than the design widths. The mask was printed in 4 min, the cost is less than one euro cent, and the process is a low temperature process suitable for temperature sensitive components.
ISSN:1742-6588
1742-6596
1742-6596
DOI:10.1088/1742-6596/757/1/012021