Vacuum coating system for deposition of superconducting WxSi(1-x) ultrathin films used in single photon detectors

VUP-11M coating system for thin films deposition in vacuum is described in this article. Technological features which appear at laboratory vacuum system modernization for implementation of dual-components WxSi(1-x) films forming process by means of magnetron co-sputtering from two sources are shown....

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Bibliographic Details
Published in:Journal of physics. Conference series 2017-07, Vol.872 (1)
Main Authors: Vasilev, D D, Malevannaya, E I, Moiseev, K M
Format: Article
Language:English
Online Access:Get full text
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Summary:VUP-11M coating system for thin films deposition in vacuum is described in this article. Technological features which appear at laboratory vacuum system modernization for implementation of dual-components WxSi(1-x) films forming process by means of magnetron co-sputtering from two sources are shown. Totals of the system modernization and research results of obtained WxSi(1-x) films are reported.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/872/1/012027