Effect of annealing treatment on structure of Ag doped ZnO films deposited by thermal evaporation method

The Ag doped ZnO films were prepared on sapphire substrates using simple thermal evaporation method. The effect of annealing treatment was investigated in detail. The results shows that the annealed Ag doped ZnO film has a prefer orientation along c-axis. The E2 (high) mode in Raman spectra has a li...

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Bibliographic Details
Published in:IOP conference series. Materials Science and Engineering 2017-06, Vol.213 (1), p.12024
Main Authors: Wang, L N, Zhou, L, Zhou, D, Yu, Y, Luan, Z Q, Tang, D L, Zhu, N, Gao, Z H, Liu, N, Hu, L Z
Format: Article
Language:English
Subjects:
Annealing
Blue shift
Compressive properties
Crystal defects
Evaporation
Lattice vacancies
Raman spectra
Sapphire
Silver
Substrates
Zinc oxide
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Summary:The Ag doped ZnO films were prepared on sapphire substrates using simple thermal evaporation method. The effect of annealing treatment was investigated in detail. The results shows that the annealed Ag doped ZnO film has a prefer orientation along c-axis. The E2 (high) mode in Raman spectra has a little blue shift which caused by crystal defects oxygen vacancies, meanwhile the compressive stress was exist in the film. After annealed, the intense of E2 modes have great improvement which means the quality of the film was enhanced, meanwhile, the compressive stress released to some extent.
ISSN:1757-8981
1757-899X
DOI:10.1088/1757-899X/213/1/012024