A study for an aluminum electro-thermally actuated U-shaped microtweezer

In this paper we present the investigations of two aluminium layers with different thicknesses in order to be used for manufacturing of MEMS and the design, simulation, fabrication and characterizations of a microtweezer designated for micromanipulation applications. Electro-thermo-mechanical finite...

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Bibliographic Details
Published in:IOP conference series. Materials Science and Engineering 2020-01, Vol.724 (1), p.12053
Main Authors: Voicu, R-C, Pustan, M, Birleanu, C, Gavrila, R, Romanitan, C, Tutunaru, O, Cismaru, A
Format: Article
Language:English
Subjects:
Aluminum
Atomic force microscopes
Atomic force microscopy
Microelectromechanical systems
Micromachining
Micromanipulation
Microscopes
Thickness
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Summary:In this paper we present the investigations of two aluminium layers with different thicknesses in order to be used for manufacturing of MEMS and the design, simulation, fabrication and characterizations of a microtweezer designated for micromanipulation applications. Electro-thermo-mechanical finite-element simulations were performed in order to describe the behaviour of MEMS devices. The microtweezers have been fabricated in aluminium, as structural material, by surface micromachining processes. Different characterizations of the structural material by Atomic Force Microscope (AFM), X-ray Diffraction System (XRD) and Scanning Electron Microscopy (SEM) characterization tools were presented.
ISSN:1757-8981
1757-899X
DOI:10.1088/1757-899X/724/1/012053