Multi-parameterised surface texture characterisation for ultra-precision machined surfaces

• Published in: Surface topography metrology and properties 2024-09, Vol.12 (3), p.35033
• Main Authors: Guo, Pan, Xiong, Zhiwen, Dong, Zengwen, Zhang, Shaojian, Piano, Samanta, Liu, Mingyu
• Format: Article
• Language: English
• Subjects: multi-parameterised surface texture characterisation; outlier effect; statistical correlation; surface metrology; ultra-precision machined surfaces
• ISSN: 2051-672X; 2051-672X
• DOI: 10.1088/2051-672X/ad6f30

In surface metrology, the multi-parameterised characterisation of surface texture measurement is beneficial not only for surface quality evaluation but also for manufacturing process inspection. To bridge this gap for ultra-precision machined surfaces, a white light interferometer was firstly employed for measuring surface texture generated by orthogonal ultra-precision machining experiments. Next, surface texture was filtered by the zero-order Gaussian regression filter to the limited scale bandwidth. Then, twenty-one surface texture parameters were calculated based on seventy-five S-L surfaces according to the ISO 25178-2. Finally, the outlier effect of surface measurement was investigated by the 95%–99% rule and the Spearman correlation coefficient matrix was proposed to determine their statistical correlation. The results revealed that most of the height parameters ( Sp , Sv , Sz , Ssk , and Sku ), several function and related parameters ( Vmp , Vvv , Spk , and Svk ), and the spatial parameter ( Str ) and hybrid parameter ( Sdr ) presented a strong sensitivity to the outlier effect. The height parameters ( Sa , Sq , Sp , Sv , and Sz ), the function and related parameters ( Vmp , Vmc , Vvv , Vvc , Spk , Svk , and Sk ), and the spatial parameters ( Sdq and Sdr ) showed a strong correlation to each other, while the miscellaneous parameter Std had a weak correlation to the other parameters. This study provides a systematic multi-parameterised surface texture characterisation for ultra-precision machined surfaces to promote the advancement of nanotechnology and nanometrology.