Low tension graphene drums for electromechanical pressure sensing

We present a process to fabricate electromechanical pressure sensors using multilayer graphene in a sealed drum geometry. The drum resonators are fabricated on insulating sapphire substrates with a local back gate for direct radio frequency ( ) actuation and detection of the mechanical modes. Using...

Full description

Saved in:
Bibliographic Details
Published in:2d materials 2016-01, Vol.3 (1), p.11003-011003
Main Authors: Patel, Raj N, Mathew, John P, Borah, Abhinandan, Deshmukh, Mandar M
Format: Article
Language:English
Subjects:
Detection
drum resonator
Gates
Graphene
Membranes
pressure sensor
Pressure sensors
Radio frequencies
Resonators
Tuning
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We present a process to fabricate electromechanical pressure sensors using multilayer graphene in a sealed drum geometry. The drum resonators are fabricated on insulating sapphire substrates with a local back gate for direct radio frequency ( ) actuation and detection of the mechanical modes. Using this scheme, we show the detection and electrostatic tuning of multiple resonant modes of the membrane up to 200 MHz. The geometry of the device also helps in attaining low tensile stress in the membrane, thereby giving high gate tunability (∼1 MHz/V) of the resonator modes. We study the resonant frequency shifts in the presence of helium gas and demonstrate a sensing capability of 1 Torr pressure in a cryogenic environment.
ISSN:2053-1583
2053-1583
DOI:10.1088/2053-1583/3/1/011003