Growth of hafnium dioxide thin films via metal-organic chemical vapor deposition

• Published in: Materials research express 2021-10, Vol.8 (10), p.106402
• Main Authors: Luo, Yuan, Hu, Jinquan, Hu, Changyi, Chang, Qiaowen, Zhao, Jun, Wei, Yan, Cai, Hongzhong
• Format: Article
• Language: English
• Subjects: Dioxides; Hafnium compounds; hafnium dioxide films; Hafnium oxide; hafnium(IV) acetylacetonate; Infrared analysis; Infrared spectroscopy; Metalorganic chemical vapor deposition; MOCVD; Morphology; Organic chemicals; Organic chemistry; Photoelectrons; Precursors; Spectrum analysis; Substrates; Thermal decomposition; Thermal stability; Thermogravimetric analysis; Thin films; Vaporization; X ray photoelectron spectroscopy
• ISSN: 2053-1591; 2053-1591
• DOI: 10.1088/2053-1591/ac2fcb

Metal-organic chemical vapour deposition (MOCVD) is a key technique for depositing thin solid film materials for use in important technological applications. To obtain thin films of the desired standard, it is essential to design volatile, reactive and thermally stable precursors. A metal-organic precursor consisting of Hf with excellent vaporization characteristics and low decomposition temperature has been reported. Hafnium dioxide thin films on a Mo substrate were obtained via thermal MOCVD using Hafnium(IV) acetylacetonate(Hf(acac)4) in a horizontal cold-wall reactor. The Hf(acac)4 precursor was synthesized from HfCl4 and Hthd in methanol. Hf(acac)4 was characterized using elemental analysis and infrared spectroscopy. The thermal decomposition properties were studied using thermogravimetric analysis under a nitrogen atmosphere. The results showed that Hf(acac)4 was completely volatised at 245 °C. The thin films products were investigated using x-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). The results from these measurements revealed that the main crystalline phase was the monoclinic phase, the surface consists of hafnium and oxygen and the morphology was densely packed and composed of visible grains.