Electroplating of Micropatterned Nickel Phase Gratings for X-ray Phase Contrast Tomography

We report on a new approach of monitoring Nickel-Sulfamate based electroplating baths to obtain a more precise control of the height of x-ray phase contrast gratings. The influence of the Ti/TiOx film substrates on electroplating start and behavior is investigated. A four phase electroplating sequen...

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Bibliographic Details
Main Authors: Amberger, Maximilian, Bade, Klaus, Meiser, Jan, Kunka, Danays, Mohr, Juergen
Format: Conference Proceeding
Language:English
Online Access:Get full text
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Summary:We report on a new approach of monitoring Nickel-Sulfamate based electroplating baths to obtain a more precise control of the height of x-ray phase contrast gratings. The influence of the Ti/TiOx film substrates on electroplating start and behavior is investigated. A four phase electroplating sequence was recorded and utilized to adaptively control the height of electroplated samples.
ISSN:1938-5862
1938-6737
DOI:10.1149/05012.0499ecst