Measurement Science for "More-Than-Moore" Technology Reliability Assessments

In this paper, we will present an overview of metrology issues and some of the techniques currently under development in our group at NIST, aimed at understanding some of the potential performance limiting issues in such highly integrated systems. We will discuss our attempts to identify and charact...

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Bibliographic Details
Published in:ECS transactions 2013-03, Vol.50 (14), p.71-79
Main Authors: Okoro, Chukwudi A., Ahn, Jung-Joon, Kelso, Meagan, Kabos, Pavel, Kopanski, Joseph J., Obeng, Yaw S.
Format: Article
Language:English
Online Access:Get full text
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Summary:In this paper, we will present an overview of metrology issues and some of the techniques currently under development in our group at NIST, aimed at understanding some of the potential performance limiting issues in such highly integrated systems. We will discuss our attempts to identify and characterize the various types of defects and relate them to where and why they form, without interrupting the responsible phenomena.
ISSN:1938-5862
1938-6737
DOI:10.1149/05014.0071ecst