Measurement Science for "More-Than-Moore" Technology Reliability Assessments

In this paper, we will present an overview of metrology issues and some of the techniques currently under development in our group at NIST, aimed at understanding some of the potential performance limiting issues in such highly integrated systems. We will discuss our attempts to identify and charact...

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Published in:ECS transactions 2013-03, Vol.50 (14), p.71-79
Main Authors: Okoro, Chukwudi A., Ahn, Jung-Joon, Kelso, Meagan, Kabos, Pavel, Kopanski, Joseph J., Obeng, Yaw S.
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container_end_page 79
container_issue 14
container_start_page 71
container_title ECS transactions
container_volume 50
creator Okoro, Chukwudi A.
Ahn, Jung-Joon
Kelso, Meagan
Kabos, Pavel
Kopanski, Joseph J.
Obeng, Yaw S.
description In this paper, we will present an overview of metrology issues and some of the techniques currently under development in our group at NIST, aimed at understanding some of the potential performance limiting issues in such highly integrated systems. We will discuss our attempts to identify and characterize the various types of defects and relate them to where and why they form, without interrupting the responsible phenomena.
doi_str_mv 10.1149/05014.0071ecst
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title Measurement Science for "More-Than-Moore" Technology Reliability Assessments
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