In-Situ Electrical Characterization of Low Temperature Getter Thin Films Activation

Non-evaporable getter materials based on transition metal alloys (Zr, V, Co, Fe, etc...) are reactive materials able to sorb species like O, N, H or C. Integrated as thin films inside MEMS packages under vacuum, they can compete with desorption during bonding and leaks during time. Their thermo-elec...

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Bibliographic Details
Published in:ECS transactions 2018-01, Vol.86 (16), p.47-53
Main Authors: Lemettre, Sylvain, Bessouet, Clément, Coste, Philippe, Lecoq, Helene, Sauvage, Thierry, Bosseboeuf, Alain, Moulin, Johan
Format: Article
Language:English
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Summary:Non-evaporable getter materials based on transition metal alloys (Zr, V, Co, Fe, etc...) are reactive materials able to sorb species like O, N, H or C. Integrated as thin films inside MEMS packages under vacuum, they can compete with desorption during bonding and leaks during time. Their thermo-electrical characteristics under varying atmospheres reflect the evolution of the microstructure and is dependent on the sorption properties. In this frame, 4-probes electrical resistivity measurements have been performed on different getter binary alloys under partial vacuum as a function of the temperature to investigate their activation and evolution.
ISSN:1938-5862
1938-6737
1938-6737
1938-5862
DOI:10.1149/08616.0047ecst