Analysis of the Impact of the Baffle Placement in the Supersonic Flow in the Differentially Pumped Chamber

The thesis follows to the work of G.D. Danilatos occupy Differential Pumping System with fast stopper focusing on dew design for environmental scanning electron microscope. Thesis concern divider located in the chamber differential pumping and its influence on the nature of the flow. Simulation of i...

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Bibliographic Details
Published in:ECS transactions 2018-01, Vol.87 (1), p.405-409
Main Author: Bílek, Michal
Format: Article
Language:English
Online Access:Get full text
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Summary:The thesis follows to the work of G.D. Danilatos occupy Differential Pumping System with fast stopper focusing on dew design for environmental scanning electron microscope. Thesis concern divider located in the chamber differential pumping and its influence on the nature of the flow. Simulation of individual variants was evaluated using the program Ansys Fluent, which calculates with the method final volumes as opposed to calculations performed by G. D. Danilatos which uses the statistical method Monte Carlo.
ISSN:1938-5862
1938-6737
1938-6737
1938-5862
DOI:10.1149/08701.0405ecst