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(Digital Presentation) Selective SiGe Vapor Etching Using Br2 in View of Nanosheet Device Isolation

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Bibliographic Details
Published in:	ECS transactions 2022-09, Vol.109 (4), p.135-140
Main Authors:	Loo, Roger, Gosset, Nicolas, Isaji, Megumi, Kawamura, Yumi, Hikavyy, Andriy Yakovitch, Rosseel, Erik, Porret, Clement, Nalin Mehta, Ankit, Girard, Jean-Marc
Format:	Article
Language:	English
Online Access:	Get full text
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