InOx Doped SnO2 Nanostructure Deposited on MEMS Device by PE-ALD Process for Detection of NO2

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2023-02, Vol.170 (2)
Main Authors: Shi, Zhong-Hong, Hsiao, Yu-Jen, Wang, Sheng-Chang, Tien, Wei-Chen
Format: Article
Language:English
Online Access:Get full text
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ISSN:0013-4651
1945-7111
DOI:10.1149/1945-7111/acb9c0