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Surface Acoustic Wave Humidity Sensors Based on ZnO/ZnO/Quartz Structures
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Published in: | ECS journal of solid state science and technology 2021-07, Vol.10 (7), p.77003 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites |
Online Access: | Get full text |
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ISSN: | 2162-8769 2162-8777 |
DOI: | 10.1149/2162-8777/ac154a |