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Surface Acoustic Wave Humidity Sensors Based on ZnO/ZnO/Quartz Structures

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Bibliographic Details
Published in:ECS journal of solid state science and technology 2021-07, Vol.10 (7), p.77003
Main Authors: Xu, Zhangliang, Li, Zhifeng
Format: Article
Language:English
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ISSN:2162-8769
2162-8777
DOI:10.1149/2162-8777/ac154a