Systematic Investigation of Growth and Properties of Ga2O3 Films on C-Plane Sapphire Substrates Prepared by Plasma-Assisted Molecular Beam Epitaxy

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Bibliographic Details
Published in:ECS journal of solid state science and technology 2022-03, Vol.11 (3)
Main Authors: Ngo, Trong Si, Le, Duc Duy, Vuong, Nguyen Quoc, Hong, Soon-Ku
Format: Article
Language:English
Online Access:Get full text
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ISSN:2162-8769
2162-8777
DOI:10.1149/2162-8777/ac5d65