Systematic Investigation of Growth and Properties of Ga2O3 Films on C-Plane Sapphire Substrates Prepared by Plasma-Assisted Molecular Beam Epitaxy

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Published in:ECS journal of solid state science and technology 2022-03, Vol.11 (3)
Main Authors: Ngo, Trong Si, Le, Duc Duy, Vuong, Nguyen Quoc, Hong, Soon-Ku
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container_title ECS journal of solid state science and technology
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Le, Duc Duy
Vuong, Nguyen Quoc
Hong, Soon-Ku
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title Systematic Investigation of Growth and Properties of Ga2O3 Films on C-Plane Sapphire Substrates Prepared by Plasma-Assisted Molecular Beam Epitaxy
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