Fabrication of ultra-flat c-axis oriented ZnO thin films on atomically stepped cyclo-olefin polymer (COP) substrates by pulsed laser deposition at RT

Highly crystalline c-axis oriented ZnO thin films with ultra-flat surfaces were fabricated by pulsed laser deposition at RT on 0.3 nm high atomically stepped cyclo-olefin polymer (COP) substrates whose surfaces were thermally nanoimprinted using atomically stepped sapphire molds. X-ray diffraction a...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2020-12, Vol.59 (12), p.128001
Main Authors: Oga, Tomoaki, Yamada, Shiori, Kaneko, Naho, Kaneko, Satoru, Matsuda, Akifumi, Yoshimoto, Mamoru
Format: Article
Language:English
Subjects:
Atomic force microscopy
atomic step
Control surfaces
Crystal structure
Crystallinity
Crystals
cyclo-olefin polymer
Flat surfaces
Morphology
nanoimprint
Polyolefins
Pulsed laser deposition
Pulsed lasers
Sapphire
Substrates
Thin films
Zinc oxide
ZnO
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Summary:Highly crystalline c-axis oriented ZnO thin films with ultra-flat surfaces were fabricated by pulsed laser deposition at RT on 0.3 nm high atomically stepped cyclo-olefin polymer (COP) substrates whose surfaces were thermally nanoimprinted using atomically stepped sapphire molds. X-ray diffraction and atomic force microscopy measurements showed that the atomically-controlled surfaces of COP substrates enhanced the c-axis orientation and surface flatness of the crystalline ZnO thin films. The ZnO thin films grown on the atomically stepped COP substrates exhibited atomically stepped surface morphology, and also the optical bandgap of about 3.3 eV and RT resistivity of 5.0 × 10−2 cm.
ISSN:0021-4922
1347-4065
DOI:10.35848/1347-4065/abc65e