Use of heavy dielectric materials in solidly mounted A1 mode resonators based on lithium niobate

This paper discusses the applicability of dielectric materials with high acoustic impedance Z a for use in A 1 Lamb mode solidly mounted resonator (SMR) with large electromechanical coupling coefficient k 2 . The study first shows that the use of metal as a reflector creates parasitic capacitance C...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2022-07, Vol.61 (SG), p.SG1001
Main Authors: Wu, Zhaohui, Shi, Bin, Li, Yawei, Temesgen Bailie, Workie, Wong, Yu-po, Bao, Jingfu, Hashimoto, Ken-ya
Format: Article
Language:English
Subjects:
A1 Lamb mode SMR
Acoustic impedance
and WO
Coupling coefficients
dielectric reflector
Dielectrics
Hafnium oxide
HfN, WN, HfO
Lithium niobates
Parasitics (electronics)
Resonators
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Summary:This paper discusses the applicability of dielectric materials with high acoustic impedance Z a for use in A 1 Lamb mode solidly mounted resonator (SMR) with large electromechanical coupling coefficient k 2 . The study first shows that the use of metal as a reflector creates parasitic capacitance C p , which reduces k 2 significantly. Then, A 1 Lamb mode SMRs are designed using HfN, HfO 2 , WN, WO 3 etc., and achievable performances are compared. When either HfN, HfO 2 , WN, or WO 3 is employed, relative large k 2 up to 25% is achievable. For further k 2 enhancement, a hybrid reflector configuration is also examined, wherein HfN is applied only to the top high Z a layer and W is applied to the others. The result indicates that C p caused by the W layers is still significant, and k 2 becomes worse in total.
ISSN:0021-4922
1347-4065
DOI:10.35848/1347-4065/ac3f6f