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Ferroelectricity of Ce–Mn substituted ZnO thin films
In this study, we introduced Ce and Mn as new substitution elements to develop ferroelectricity in wurtzite-type ZnO thin films on Pt/Ti/SiO 2 /Si. By substituting (Ce,Mn) for Zn, we observed a decrease in the c / a ratio, which reached its minimum value of 1.582. The relative permittivity increased...
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Published in: | Japanese Journal of Applied Physics 2024-01, Vol.63 (1), p.10902 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | In this study, we introduced Ce and Mn as new substitution elements to develop ferroelectricity in wurtzite-type ZnO thin films on Pt/Ti/SiO
2
/Si. By substituting (Ce,Mn) for Zn, we observed a decrease in the
c
/
a
ratio, which reached its minimum value of 1.582. The relative permittivity increased from 12 to 20 with increasing (Ce,Mn) concentration (2%–15%), while the dielectric loss remained low at about 0.01. The Zn(Ce,Mn)O thin films exhibited clear ferroelectric behavior with a remanent polarization of more than 80
μ
C cm
−2
and a coercive field of about 2.5 MV cm
−1
. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.35848/1347-4065/ad1425 |