Evolution of implicate order from amorphous to polycrystalline Sn-doped In2O3 films determined by in situ two-dimensional X-ray diffraction measurements

We elucidated implicate ordering of amorphous Sn-doped In2O3 films grown on glass substrates during the phase transition to polycrystalline by postannealing from room temperature to 300 °C for 55 min. X-ray diffraction with two-dimensional detector revealed the following. First, fine grains are deve...

Full description

Saved in:
Bibliographic Details
Published in:Applied physics express 2020-06, Vol.13 (6)
Main Authors: Furubayashi, Yutaka, Kobayashi, Shintaro, Maehara, Makoto, Ishikawa, Kazuhiko, Inaba, Katsuhiko, Sakemi, Toshiyuki, Kitami, Hisashi, Yamamoto, Tetsuya
Format: Article
Language:English
Subjects:
Crystallization temperature
Indium oxide
Solid state crystallization
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We elucidated implicate ordering of amorphous Sn-doped In2O3 films grown on glass substrates during the phase transition to polycrystalline by postannealing from room temperature to 300 °C for 55 min. X-ray diffraction with two-dimensional detector revealed the following. First, fine grains are developed. Second, crystallites are grown with (222) preferential orientation associated with growing crystallites along (222) plane. Simultaneously, the alignment between grains is also promoted. Finally, while retaining the alignments among crystallites, long-range ordering was improved within the crystallites. Based on those findings, as a well-defined crystallization temperature, we propose a temperature at which the above-mentioned final stage starts.
ISSN:1882-0778
1882-0786
DOI:10.35848/1882-0786/ab8b6b