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Growth conditions for high-photoresponsivity randomly oriented polycrystalline BaSi2 films by radio-frequency sputtering: Comparison with BaSi2 epitaxial films

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Bibliographic Details
Published in:Applied physics express 2022-02, Vol.15 (2)
Main Authors: Koitabashi, Ryota, Kido, Kazuki, Hasebe, Hayato, Yamashita, Yudai, Toko, Kaoru, Mesuda, Masami, Suemasu, Takashi
Format: Article
Language:English
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ISSN:1882-0778
1882-0786
DOI:10.35848/1882-0786/ac4676