Deformable silicone grating with submicrometer period

We fabricated a deformable transmission grating with a silicone elastomer [poly(dimethylsiloxane)], and evaluated its optical characteristics during a compression process. This grating pattern was created on a silicone surface by a polymer mold that had been fabricated by photo-imprinting process wi...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2014-06, Vol.53 (6S), p.6-1-06JE03-5
Main Authors: Ishihara, Takaaki, Yamada, Itsunari, Yanagisawa, Junichi, Nishii, Junji, Saito, Mitsunori
Format: Article
Language:English
Subjects:
Compressing
Compressive properties
Deformation
Diffraction gratings
Formability
Gratings (spectra)
Molds
Silicon carbide
Silicones
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Summary:We fabricated a deformable transmission grating with a silicone elastomer [poly(dimethylsiloxane)], and evaluated its optical characteristics during a compression process. This grating pattern was created on a silicone surface by a polymer mold that had been fabricated by photo-imprinting process with an SiC mold to realize a simple, low-cost fabrication process. We also measured the relationship between the grating period and compressive stress to the fabricated elements. The grating periods of the fabricated elements were evaluated from the measured diffraction angles. The grating periods of 3.02 and 410 nm were changed to 2.86 µm pitch and to 368 nm pitch, respectively, by compressing the fabricated element in one direction, perpendicular to the grooves.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.53.06JE03