Low temperature activation of Au/Ti getter film for application to wafer-level vacuum packaging

Non-evaporable getter (NEG) thin films based on alloys of transition metals have been studied by various authors for vacuum control in wafer-level packages of micro electro mechanical systems (MEMS). These materials have typically a relatively high activation temperature (300-450 °C) which is incomp...

Full description

Saved in:
Bibliographic Details
Published in:Japanese Journal of Applied Physics 2015-03, Vol.54 (3), p.30220-1-030220-6
Main Authors: Wu, Ming, Moulin, Johan, Lani, Sébastien, Hallais, Géraldine, Renard, Charles, Bosseboeuf, Alain
Format: Article
Language:English
Subjects:
Activation
Gettering
Gold
Mechanical systems
Packaging
Scanning electron microscopy
Titanium
X-ray photoelectron spectroscopy
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Non-evaporable getter (NEG) thin films based on alloys of transition metals have been studied by various authors for vacuum control in wafer-level packages of micro electro mechanical systems (MEMS). These materials have typically a relatively high activation temperature (300-450 °C) which is incompatible with some temperature sensitive MEMS devices. In this work we investigate the potential of Au/Ti system with a thin or ultrathin non oxidizable Au layer as a low activation temperature getter material. In this bilayer system, gettering activation is produced by thermal outdiffusion of titanium atoms through the gold film. The outdiffusion kinetics of titanium was modelled and characterized by scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), and Rutherford backscattering spectrometry (RBS) at various temperatures. Results confirm that Au/Ti bilayer is a promising getter material for wafer-level packaging with an activation temperature below 300 °C for 1 h annealing time.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.54.030220