Spectroscopic ellipsometry studies on β-Ga2O3 films and single crystal

Anisotropic optical properties are investigated on β-Ga2O3 films and a single crystal by spectroscopic ellipsometry measurements. The films grown on (0001) α-Al2O3 contain threefold in-plane rotational domains, and the refractive index and absorption coefficient α obtained by assuming an isotropic m...

Full description

Saved in:
Bibliographic Details
Published in:Japanese Journal of Applied Physics 2016-12, Vol.55 (12)
Main Authors: Onuma, Takeyoshi, Saito, Shingo, Sasaki, Kohei, Masui, Tatekazu, Yamaguchi, Tomohiro, Honda, Tohru, Kuramata, Akito, Higashiwaki, Masataka
Format: Article
Language:English
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Anisotropic optical properties are investigated on β-Ga2O3 films and a single crystal by spectroscopic ellipsometry measurements. The films grown on (0001) α-Al2O3 contain threefold in-plane rotational domains, and the refractive index and absorption coefficient α obtained by assuming an isotropic material are found to be smaller than those in the single crystal. By measuring the off-normal transmission ellipsometry spectra of the (010) β-Ga2O3 substrate, the optical anisotropy in a biaxial crystal as well as the gradual increase in α are recognized as origins of the scattering in optically determined bandgap energies.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.55.1202B2