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Reading of optical information from a metal-insulator-semiconductor structure by an electron beam

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Bibliographic Details
Published in:Soviet journal of quantum electronics 1975-12, Vol.5 (12), p.1430-1431
Main Authors: Bel'skikh, A V, Vasil'ev, B I, Plotnikov, A F, Shubin, V É
Format: Article
Language:English
Online Access:Get full text
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ISSN:0049-1748
2169-530X
DOI:10.1070/QE1975v005n12ABEH012164