Effect of photoabsorptive convection on the rate of cw-CO2-laser induced chemical vapor deposition of amorphous hydrogenated silicon

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Bibliographic Details
Published in:Quantum electronics (Woodbury, N.Y.) N.Y.), 1993-09, Vol.23, p.805
Main Authors: Deryugin, A A, Mishakov, Gennadii V
Format: Article
Language:English
Online Access:Get full text
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ISSN:1063-7818
DOI:10.1070/QE1993v023n09ABEH003174