Development of high-power KrF lasers with a pulse repetition rate up to 5 kHz

An experimental investigation was made of the principal factors that determine the possibility to increase pulse repetition rates in high-power KrF lasers. Two prototypes of a compact industrial KrF laser were considered. The first one produces a maximum average output power of {approx}620 W for a p...

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Bibliographic Details
Published in:Quantum electronics (Woodbury, N.Y.) N.Y.), 2000-09, Vol.30 (9), p.783-786, Article 783
Main Authors: Borisov, V M, Vinokhodov, A Yu, Vodchits, V A, El'tsov, A V, Ivanov, A S
Format: Article
Language:English
Subjects:
DESIGN
ENGINEERING
EXCIMER LASERS
FREQUENCY RANGE
GAS LASERS
KHZ RANGE
KRYPTON FLUORIDE LASERS
LASERS
PULSES
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Summary:An experimental investigation was made of the principal factors that determine the possibility to increase pulse repetition rates in high-power KrF lasers. Two prototypes of a compact industrial KrF laser were considered. The first one produces a maximum average output power of {approx}620 W for a pulse repetition rate of 4 kHz; the second, a more compact prototype, yields a maximum pulse repetition rate of 5 kHz for an average output of 200 W. (lasers)
ISSN:1063-7818
1468-4799
DOI:10.1070/QE2000v030n09ABEH001811