Target hysteresis and film properties of sputtered NbN

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 1989-11, Vol.22 (11), p.1788-1790
Main Authors: Vaneldik, J F, Westra, K L, Routledge, D, Brett, M J
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/22/11/037