The improvement of the atmospheric-pressure glow plasma method and the deposition of organic films

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 1990-03, Vol.23 (3), p.374-377
Main Authors: Yokoyama, T, Kogoma, M, Kanazawa, S, Moriwaki, T, Okazaki, S
Format: Article
Language:English
Subjects:
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/23/3/021