Determination of different orientations in epitaxial silicide layers using X-ray diffraction

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 1991-06, Vol.24 (6), p.937-941
Main Authors: Vanderstraeten, H, Bruynseraede, Y, Wu, M F, Vantomme, A, Langouche, G
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Structure of solids and liquids
crystallography
X-ray diffraction and scattering
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/24/6/019