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Direct synthesis of TiSi2 by a laser thermal self-aligned process
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Published in: | Journal of physics. D, Applied physics Applied physics, 1992-10, Vol.25 (10), p.1500-1503 |
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Main Authors: | , , , , , , , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 0022-3727 1361-6463 |
DOI: | 10.1088/0022-3727/25/10/016 |