Thermal accommodation of a gas on a surface and heat transfer in CVD and PECVD experiments

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 1997-02, Vol.30 (4), p.499-509
Main Authors: Leroy, Olivier, Perrin, Jérôme, Jolly, Jacques, Péalat, Michel, Lefebvre, Michel
Format: Article
Language:English
Subjects:
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/30/4/001