Thin silicon device technology

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 1970-08, Vol.3 (8), p.1199-1204, Article 308
Main Authors: Mash, D H, Henshall, G D, Eales, B A
Format: Article
Language:English
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Summary:Abstract only
ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/3/8/308