Excimer laser with narrow linewidth and large internal beam divergence

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Bibliographic Details
Published in:Journal of physics. E, Scientific instruments Scientific instruments, 1987-11, Vol.20 (11), p.1394-1396
Main Authors: Muckenheim, W, Ruckle, B
Format: Article
Language:English
Subjects:
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Gas lasers including excimer and metal-vapor lasers
Lasers
Optics
Physics
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ISSN:0022-3735
DOI:10.1088/0022-3735/20/11/019