Furnace control using non-thermal parameters (semiconductor growth)

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Bibliographic Details
Published in:Journal of physics. E, Scientific instruments Scientific instruments, 1989-08, Vol.22 (8), p.617-618
Main Authors: Duffill, G R, Dunstan, D J
Format: Article
Language:English
Subjects:
Applied sciences
Devices using thermal energy
Energy
Energy. Thermal use of fuels
Exact sciences and technology
Furnaces
Online Access:Get full text
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ISSN:0022-3735
DOI:10.1088/0022-3735/22/8/016