Strain relaxation in epitaxial Si1-xGex layers during some silicidation processes

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Bibliographic Details
Published in:Physica scripta 1994-01, Vol.1994, p.294
Main Authors: Nur, O, Sardela, M R, Radamson, H H, Willander, M, Hansson, G V, Hatzikonstantinidou, S
Format: Article
Language:English
Online Access:Get full text
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ISSN:1402-4896
1402-4896
DOI:10.1088/0031-8949/1994/T54/070