Growth of Biaxially Textured Yttria-Stabilized Zirconia Thin Films on Si(111) Substrate by Ion Beam Assisted Deposition

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Bibliographic Details
Published in:Chinese physics letters 2000-03, Vol.17 (3), p.221-223
Main Authors: Mu), Hai-Chuan Mu (Hai-Cuan, Ren, Cong-Xin, Jiang, Bing-Yao, Ding, Xing-Zhao, Yu, Yue-Hui, Wang, Xi, Liu, Xiang-Huai, Zhou, Gui-En, Jia, Yun-Bo
Format: Article
Language:English
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ISSN:0256-307X
1741-3540
DOI:10.1088/0256-307X/17/3/023