Apparatus for Real-Time Measurement of Stress in Thin Films at Elevated Temperatures

Saved in:
Bibliographic Details
Published in:Chinese physics letters 2003-08, Vol.20 (8), p.1387-1389, Article 1387
Main Authors: Bing, An, Tong-Jun, Zhang, Chao, Yuan, Kun, Cui
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0256-307X
1741-3540
DOI:10.1088/0256-307X/20/8/360