Growth of Nanocrystalline Silicon Films by Helicon Wave Plasma Chemical Vapour Deposition

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Bibliographic Details
Published in:Chinese physics letters 2004-07, Vol.21 (7), p.1320-1322
Main Authors: Wei, Yu, Bao-Zhu, Wang, Wan-Bing, Lu, Yan-Bin, Yang, Li, Han, Guang-Sheng, Fu
Format: Article
Language:English
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ISSN:0256-307X
1741-3540
DOI:10.1088/0256-307X/21/7/038