Step-by-Step Laser Crystallization of Amorphous Si:H/SiNx:H Multilayer for Active Layer in Microcavities

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Bibliographic Details
Published in:Chinese physics letters 2006-05, Vol.23, p.1302
Main Authors: Bo, Qian, San, Chen, Zhan-Hong, Cen, Kun-Ji, Chen, Yan-Song, Liu, Jun, Xu, Zhong-Yuan, Ma, Wei, Li, Xin-Fan, Huang
Format: Article
Language:English
Online Access:Get full text
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ISSN:0256-307X
1741-3540
DOI:10.1088/0256-307X/23/5/066