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Effect of Substrate Temperature on the Structural, Electrical and Optical Properties of Nanocrystalline Silicon Films in Hot-Filament Chemical Vapor Deposition

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Bibliographic Details
Published in:	Chinese physics letters 2011-02, Vol.28 (2), p.028103
Main Authors:	Guo, Xiao-Song (小松郭), Zhang, Shan-Shan (山山章), Bao, Zhong (忠包), Zhang, Hong-Liang (洪亮张), Chen, Chang-Cheng (长城陈), Liu, Li-Xin (立新刘), Liu, Yan-Xia (延霞刘), Xie, Er-Qing (二庆谢)
Format:	Article
Language:	English
Citations:	Items that cite this one
Online Access:	Get full text
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