Process induced deep-level defects in high purity silicon

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Bibliographic Details
Published in:Semiconductor science and technology 1998-05, Vol.13 (5), p.488-495
Main Authors: Astrova, E V, Voronkov, V B, Kozlov, V A, Lebedev, A A
Format: Article
Language:English
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ISSN:0268-1242
1361-6641
DOI:10.1088/0268-1242/13/5/008