Characterization on the current-voltage curves of ultrathin silicon dioxides incorporated with fluorine and/or nitrogen

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Bibliographic Details
Published in:Semiconductor science and technology 2001-12, Vol.16 (12), p.961-965
Main Authors: Chang, W J, Houng, M P, Wang, Y H
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Conductivity phenomena in semiconductors and insulators
Electronic transport in condensed matter
Exact sciences and technology
Physics
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ISSN:0268-1242
1361-6641
DOI:10.1088/0268-1242/16/12/302