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Carbon in the presence of high oxygen levels in polysilicon: the effect on poly-to-poly dielectric breakdown

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Bibliographic Details
Published in:	Semiconductor science and technology 2007-03, Vol.22 (3), p.179-185
Main Authors:	Hafer, Richard F, Moss, T S
Format:	Article
Language:	English
Subjects:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Dielectric breakdown and space-charge effects Dielectric properties of solids and liquids Dielectrics, piezoelectrics, and ferroelectrics and their properties Exact sciences and technology Physics
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
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