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Creation of GaAs microstructures using the nuclear nanoprobe LIPSION

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Bibliographic Details
Published in:	Semiconductor science and technology 2008-12, Vol.23 (12), p.125028
Main Authors:	Menzel, F, Spemann, D, Lenzner, J, Böhlmann, W, Zimmermann, G, Butz, T
Format:	Article
Language:	English
Subjects:	Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Physics Surface treatments
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
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