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Stability of crystalline Gd2O3 thin films on silicon during rapid thermal annealing

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Bibliographic Details
Published in:	Semiconductor science and technology 2008-03, Vol.23 (3), p.035010
Main Authors:	Czernohorsky, M, Tetzlaff, D, Bugiel, E, Dargis, R, Osten, H J, Gottlob, H D B, Schmidt, M, Lemme, M C, Kurz, H
Format:	Article
Language:	English
Subjects:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Dielectric properties of solids and liquids Dielectric thin films Dielectrics, piezoelectrics, and ferroelectrics and their properties Exact sciences and technology Permittivity (dielectric function) Physics
Online Access:	Get full text
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