One-, two-and three-dimensional nanostructures with atom lithography

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Bibliographic Details
Published in:Journal of physics. Condensed matter 2003-02, Vol.15 (6), p.R233-R255
Main Authors: Oberthaler, Markus K, Pfau, Tilman
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Lithography, masks and pattern transfer
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0953-8984
1361-648X
DOI:10.1088/0953-8984/15/6/201